Apr 14, 2026  
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CPEG 446 - MEMS (Micro-Electro-Mechanical Systems)

3 credit(s)

Basic micro fabrication techniques, MEMS materials and their properties, MEMS device design and simulation, MEMS packaging and assembly, signal testing and MEMS reliability analysis. MEMS industrial applications in various areas will also be discussed. Students used ANSYS FEM software to design and simulate their behavior.


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