ELEG 346 - Fundamentals of MEMS (Microelectromechanical Systems)

3 Credit(s)

Prerequisites: Senior status (90+ credits) 3
MEMS (Microelectromechanical Systems) refers to devices and system with extremely small size in the range of microns. It is one of the most important high technologies developed in 20th century. MEMS and nanotechnology are believed to trigger the next wave of technology revolution. This course covers the fundamentals of MEMS technology. The topics include MEMS materials, MEMS fabrication techniques, MEMS structure analysis, MEMS sensing and actuation techniques, MEMS applications (inertial MEMS, MOEMS, BioMEMS, RFMEMS), signal sensing techniques for MEMS, MEMS packaging and reliability, etc. Pre-requisite